Purion Bushing

For use as an alternative to Axcelis PURION source bushing.

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SKU: ESBPE Category:
General Details
For use with the Axcelis PURION Implanter

A high-performance version of the Axcelis Purion source bushing. This bushing is designed to provide:
  1. Better high-voltage performance
  2. Extended life
  3. Extended time between cleanings
Design: An additional rib in the inner wall, making the interior wall 23% longer.

  • More voltage insulation value
  • More coating surface

Materials: Manufactured from improved composite material

  • Better heat distribution
  • More resistant to head (arcing) damage

OEM: Axcelis/Eaton


Potentials P/N: ESBPE

Purion H

Price: 3863.39
Lead Time: 5