Our Services

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OUR NEWEST PRODUCTS

We provide new replacement bushings for all the major types of implanters. Each new bushing incorporates improvements in both design and materials to provide the customer with better performance at an economical price.

Refurbishment

Our refurbishment experience has provided us with a broad knowledge of the types of bushing damage caused by the equally large number of processes being run on ion implanters. Each bushing to be refurbished undergoes a thorough damage analysis based on this knowledge base.

REASONS TO USE OUR REFURBISHMENT SERVICES

1

Our refurbishment experience has provided us with a broad knowledge of the types of bushing damage caused by the equally large number of processes being run on ion implanters.

2

Each bushing to be refurbished undergoes a thorough damage analysis based on this knowledge base.

3

The result is a recommended refurbishment method that is a best fit for the customer and process, and may include the opportunity for bushing enhancement at little or no additional cost.

Enhancement

We offer two types of enhancement options to improve the performance of refurbished bushings: modification and partial relining. Both enhancements can improve the life and/or the voltage/beam capacity of the bushing.

Modification
Modification of a bushing includes both renewing a bushing interior wall by removing material, while reshaping the wall to improve performance.
Partial Relining
Partial Relining of a bushing adds new and stronger material (**) to areas most susceptible to arcing damage.