Ion implanters used by the semiconductor industry produce high volume and run constantly. As a result, their bushings often need refurbishment and enhancement including wall modification and reshaping as well as relining. Both of these enhancements can improve the life and/or the voltage/beam capacity of the bushing.
In addition to the refurbishment and enhancement services, we also provide new replacement bushings for all the major types of ion implanters. Each new bushing incorporates improvements in both design and materials to provide the customer with better performance at a cost-effective price.