AMSIQ

Potentials Enhanced Design AMSIQ

 

Ceramic Loading

Potentials enhanced design features a ceramic loaded body which forms the exterior and interior wall. This ceramic loading provides high thermal conductivity and a very high melting point. Possible arcing damage is thus reduced.

Potentials, Inc. refurbishment process will remove all damaged material from a damaged bushing. We then test for complete removal of damage and replace any and all damaged material with stronger Potentials material. Upon completion of testing for damaged material, we smooth, reseal and vacuum test to ensure a quality product is returned to operation.

Our refurbishment experience has provided us with a broad knowledge of the types of bushing damage caused by the equally large number of processes being run on ion implanters. Each bushing to be refurbished undergoes a thorough damage analysis based on this knowledge base.

Potentials enhanced design features a ceramic loaded partial reline of the interior wall. This ceramic loading provides high thermal conductivity and a very high melting point. Possible arcing damage is thus reduced.

Our enhancement experience has provided us with a broad knowledge of the types of bushing damage caused by the equally large number of processes being run on ion implanters. Each bushing to be enhanced undergoes a thorough damage analysis based on this knowledge base.