Products

OemImageOEM Part NumberPotentials Part NumberToolDescriptionServicesEnhancement Available Interior Wall Material
SEN

11F0500

ESBME2

SEN

Source bushing, red, no shielding, with O-ring groove, no inserts, with enhanced interior wall and enhanced material

New24%
NissinNSI3E

Nissin

Solid ceramic bushing with inserts on both sides, unglazed

New45% longer interior wall, 99.5% alumina
NissinNAT

Nissin

Nissin medium current accelerator tube, ceramic insulators silver soldered to metal electrode spacers, with removable aluminum electrodes

Refurbish
Axcelis/Eaton

170164727

ESBPE

Purion H

Source bushing, red, no shielding, with inserts and two alignment slots per side, full circle handle on one side, enhanced material and interior wall

New
Applied Materials

0020-80157

AMPAB

Applied Materials 9500

Acceleration Bushing, Orange, with lead shielding, with enhanced material (original is green)

NewMaterial

E17075721

VABHHP

Viision
Viista

Acceleration Bushing, Red, oblong shape, inserts and pin holes on both sides

Refurbish
AMAT/Varian

E17029860
E17084641
E19010120
E19285970

VSBHHPE

Viision
Viista

Source bushing, red, no shielding, with inserts and pins, with added web in interior wall and enhanced material

New, Refurbish25% Longer Wall, Enhanced Material
AMAT/Varian

4154600

VSBG1510E

Genus
Kestral

Red source bushing, 12 inserts on each side, with added web in interior wall and enhanced material

New100%
AMAT/Varian

1106005

VAT

300XP
350D

Red acceleration tube, polished electrodes and vented screws

RefurbishPolished Metal, Vented Screws
AMAT/Varian

927001

VPT

300XP
350D

Red, five insulator tube - polished baffles, refurbishment in two (2) alternate lengths, made to length (16.142" or 16.335")

RefurbishPolished Metal
AMAT/Varian

E11287780

VSBCWC

PLAD

RF Chamber bushing, ceramic base with vertical and horizontal cooling/induction coils, silicone coating

New, Refurbish
Axcelis/Eaton

1153480
1795140

ESB/GSDWNL

NV20
Ultra 8200
8250

Source bushing, white, with inserts, enhanced inner wall and material

New, Refurbish
Axcelis/Eaton

12S1289
1715920
1754620

ESBW

NV-10

Source bushing, white, O-ring groove, no inserts, enhanced inner wall and material

New, Refurbish22%
AMAT/Varian

E11003020
E11044200
E17084910
E17123040

VSBE220

E220/E500

Source Bushing, Red, Not Shielded, with Inserts, Enhanced material and wall design

New, Refurbish20%

109887001

VSB

80-10
120-10
120XP

Source bushing, red, without shielding, with inserts

AMAT/Varian

E17125590

VSBE500

VIIsta 810
E500HP

Source bushing, red, without shielding, recessed flange surface on one side, with inserts on both sides, enhanced interior wall and material

New, Refurbish30%
AMAT/Varian/Novelus

04-707819-02

VQRH

3180
3280
3190
3290
M2000
M2i

Refurbishment, including repair of all possible water leaks, replacement of burned or damaged material, static water pressure test

RefurbishHigh performance material used for repairs
SENESBSAION

SAION

Source bushing, red, without shielding, allignment slots and lips on both sides, clamping slots on one side, enhanced inner wall and material

New
Axcelis/Eaton

19010120
17174960
17322400

ESB/GSDRNL

GSD

Source bushing, red, without shielding, with handles and inserts, enhanced inner wall and material

New, Refurbish
Axcelis/Eaton

170102980
170111300

ESB/GSD2RNL

GSD

Source bushing, red, without shielding, with handles and inserts, water cooled, enhanced interior wall and material

New, Refurbish

0342-0259-3001

ESI

3206
6200

Refurbished source assembly, includes two flanges and ceramic insulator

Axcelis/Eaton

0342-0648-3001

EATHG

3206
6200

Accelerator tube, refurbished with polished electrodes and reglazed ceramic insulators

Refurbish
Applied Materials

0040-45472
0040-95979
0040-99226
0040-95999
0041-11324

AMSIXR80

LEAP
XR80
Quantum I
Quantum II

Source Bushing, Orange, X-ray Shielded, Inserts on one side, OEM version is green

New
AIBT

151-00114-00

AIBTSBE

iPulsar+

Source Bushing for AIBT implanter with 42 insets/pins, unshielded, with enhanced red material and enhanced wall design

New
Applied MaterialsAMABE

Applied Materials 9500

Acceleration Bushing, Orange, with lead shielding, with enhanced material (original is green) and grooved interior wall

New
Applied Materials

0040-51795
0041-11326

AMSIQ

Quantum

Source bushing, orange throughout, with shielding, with inserts on one side, two locking lugs on opposite side, new made with enhanced material

New
Axcelis/Eaton

17174960
17083980
17100510
170093550
170093560

ESB/GSD

GSD

Source/Accel bushing, orange, with shielding, with handles and inserts, enhanced interior wall and material

New, Refurbish
Axcelis/Eaton

11022760
110046400
170111300

ESB/GSD2

GSD

Source bushing, orange, with shielding, with handles and inserts, enhanced interior wall and material

New, Refurbish
Applied Materials

0240-91623
0040-45296
0040-91626
0040-92795
0040-99252
0041-11325

AMSI9500

Applied Materials 9500

Source Bushing, Orange, X-ray Shielded, Inserts on one side, Enhanced material

New