For use in the Applied Materials 9500 Implanter
For use in the Quantum III, QX+
For use in the Eaton/Axcelis GSD Implanter
For use as an alternative to Axcelis PURION source bushing.
For use in the Varian E1000 Implanter
For use in the Varian/VASE E500HP Implanter
For use in the Varian/VASE Viision/Viista Implanter
For use in Nissin Exceed 2000 Implanter